| abstract |
Disclosed is a process for producing a fluoride gas that can provide fluoride gases such as BF 3 , SiF 4 , GeF 4 , PF 5 or AsF 5 at a reduced production cost in a simple manner. The process is characterized in that a compound containing atoms, which, together with fluorine atoms, can form polyatomic ions, is added to a hydrogen fluoride solution to produce the polyatomic ions in a hydrogen fluoride solution and to evolve a fluoride gas comprising the fluorine atoms and the atoms that, together with the fluorine atoms, can form polyatomic ions. |