http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2310830-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_14694e9b7e91a46def10125369f1bf5b |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B7-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2203-0286 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2203-0051 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2203-0617 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N19-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q60-366 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N3-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N3-40 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N3-42 |
| filingDate | 2009-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9eef4e779cd1f748dbb5027b0b3ad30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16b2dab86df4c64288bd7ab55e695226 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f12846e67d95b0672ec401881590a5b3 |
| publicationDate | 2011-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-2310830-A1 |
| titleOfInvention | Micromachined comb drive for quantitative nanoindentation |
| abstract | A microelectromechanical (MEMS) nanoindenter transducer including a body, a probe moveable relative to the body, an indenter tip coupled to an end of the moveable probe, and a micromachined comb drive. The micromachined comb drive includes an electrostatic actuator capacitor comprising a plurality of comb capacitors configured to drive the probe, together with the indenter tip, along a displacement axis, including in an indentation direction, upon application of a bias voltage to the actuation capacitor. The micromachined comb drive further includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe, wherein each of the comb capacitors of the actuator capacitor and the sensing capacitors includes a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe. |
| priorityDate | 2008-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.