| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eb2648e65ad8850515bd727a122f1186 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
2009-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5bdc0e10c543ef3e60e0a118364487fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50fe737ace905461592f2ec1c05f6815
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0f4ca707a149b02c1cf479631b2210f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcda89ea6bd34e6beed8c6ab10fbac44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_343e2b0b453e4d80a7cb1db1b5ffed04 |
| publicationDate |
2014-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2310551-B1 |
| titleOfInvention |
Method of forming a tantalum-containing layer on a substrate |
| priorityDate |
2008-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |