| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60480587582bf8e0ca64c6076c0646ab |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-5873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-548
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-5846
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-221 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-58 |
| filingDate |
2010-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35addce9f31290c05213295673389942
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e688be7602f9bbad312e988063cef5cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ed0f46c6c657e35f329b5d4eef40b46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_71addffbe0a4cb8b78c58a229dd14743 |
| publicationDate |
2014-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2309020-B1 |
| titleOfInvention |
Method of using nitrogen based compounds in beam-induced processing |
| priorityDate |
2009-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |