Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-545 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1824 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-202 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02529 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24 |
filingDate |
2010-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a772046f35877b4c0cb2f2a83d5f022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9797b5471d337e85a6c41f8d9e10e7db http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e561b2eee49d7996604a0e2fdc929bfe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b78ad421678e5e9b661551fb40379995 |
publicationDate |
2011-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-2298955-A1 |
titleOfInvention |
Additives to silane for thin film silicon photovoltaic devices |
abstract |
The objective of this invention is to use chemical additives to increase the rate of deposition processes for the amorphous silicon film (αSi:H) and/or the microcrystalline silicon film (µCSi:H), and improve the electrical current generating capability of the deposited films for photoconductive films used in the manufacturing of Thin Film based Photovoltaic (TFPV) devices. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102016205446-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017167715-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109153575-A |
priorityDate |
2009-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |