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filingDate 2009-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2010-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-2240399-A1
titleOfInvention Microfluidic device and methods of operation and making
abstract A microelectromechanical system (MEMS) device and a method for operating the device to determine at least one property of a fluid. The device includes a base on a substrate and a tube structure extending from the base and spaced apart from a surface of the substrate. The tube structure includes at least one tube portion and more preferably at least a pair of parallel tube portions substantially lying in a plane, at least one continuous internal passage defined at least in part within the parallel tube portions, and an inlet and outlet of the internal passage fluidically connected to the base. A drive element is operable to induce vibrational movement in the tube structure in a plane of the tube structure and induce resonant vibrational movements in the tube portions. A sensing element senses the deflections of the tube portions when the tube structure is vibrated with the drive element.
priorityDate 2008-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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