| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aafe0172ffd94d3486c518b0709bb2b3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-16 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate |
2008-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fb99758c98ee8b0a4f908e5d08022e4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a1b0bd0580d167cf31a8294373833ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e3cdbba8a261e12da28881039f03d00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc9038bbaefc4aff2ab911b0dda66757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2522a3ee0ab310ad09d07fb550afef1c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd9538d14b2240045123fb720268dc7b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4edab0e9a0ce2e838e614dbe691f285 |
| publicationDate |
2012-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2229607-A4 |
| titleOfInvention |
SILICON-BASED HARD MASK COMPOSITION (SI-SIOH BASED ROTATION HARD MASK) AND METHOD FOR PRODUCING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE USING THE SAME |
| priorityDate |
2008-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |