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publicationDate 2010-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-2220667-A1
titleOfInvention Method of forming backside point contact structures for silicon solar cells
abstract Methods are provided to process a substrate, such as a silicon solar cell. In one embodiment, a method is provided for fabricating point contacts to a surface of a silicon solar cell by coating the surface with a masking layer and a laser absorptive layer and directing laser radiation to the surface to form openings therein after which doping material is applied through the openings and contacts are applied. The doping is preferably performed by plasma immersion ion implantation.
priorityDate 2007-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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