| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D167-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-0254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-36 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate |
2010-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89cdff01f4b46cc5969090e6e988d2dc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b61cfadd74185e9e1eb267fdac7e21e0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9fc0107602834e2724556564b9c12d5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3caa235af850b5ec59730ccb830119a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f4a48de971666c2de55d11d51b1484a |
| publicationDate |
2018-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2216683-B1 |
| titleOfInvention |
Substrates coated with an antireflective composition and a photoresist |
| priorityDate |
2009-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |