| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_730848fc69ca7afca2b3c3e10b6cfd92 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0758
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate |
2008-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4cd98f094087b2421f9cf1d7d3d72914
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e93796b20031765d8b834b2b608175ff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3853d108daa2cde9b519a77b9c047b69
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a665b8e9b0300b39ab2b7d3281bd88b8 |
| publicationDate |
2011-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2199861-A4 |
| titleOfInvention |
COMPOSITION FOR FORMING A SILICULAR FINE PATTERN AND METHOD FOR FORMING A FINE PATTERN THEREWITH |
| priorityDate |
2007-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |