| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7442b6cce4e96d3dc4a380851e9224d8 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 |
| filingDate |
2008-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a801b98e4d63f3893a346ada50d0e93
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_726fac005b46c3a281a140dcb4311a2e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61176aa19ec4153a34288e9fa9b3f041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9c15bb120ca5dc005f1052a382a6313
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d02ad4910e15a94c4262dff734bef1ca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70c98b382aa655e289ad2c8d565b6778
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f91c294dede7f1de9e3cc125e14820b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13f07c1c9c0f113c0fd27a7402e3fb44 |
| publicationDate |
2017-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2183769-B1 |
| titleOfInvention |
Copper metallization of through silicon via |
| priorityDate |
2007-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |