http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2157402-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-051 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B21-085 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C3-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01M99-002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B21-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67242 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01M99-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B21-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B21-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate | 2009-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25d88130b22855b0a610c6f0bedb6c5b |
| publicationDate | 2010-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-2157402-A1 |
| titleOfInvention | Device for measuring the alignment of attached structures |
| abstract | The invention relates to the field of micro and nanotechnologies.n n n In these techniques, it is sometimes necessary to stick several structures face to face and it is important to be able to control the alignment of the structures. For this purpose, a new alignment measurement method is proposed, which comprises the following operations: activation of a heating element (ECH) placed on the surface of the first structure (S1), - generating electronic signals representative of a temperature distribution, from an array of temperature-sensitive elements (ES) placed on the surface of the second structure (S2), determining a relative position of the heating element with respect to the network of sensitive elements, therefore of the first structure relative to the second, from the temperature distribution, in a computing circuit receiving the generated electronic signals in the network of sensitive elements. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11705426-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022045030-A1 |
| priorityDate | 2008-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10633 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID136169249 |
Total number of triples: 24.