http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2155925-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45527 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate | 2008-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26b106bab26259be9d861e7313ecc159 |
| publicationDate | 2010-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-2155925-A1 |
| titleOfInvention | Atomic layer deposition methods, methods of forming dielectric materials, methods of forming capacitors, and methods of forming dram unit cells |
| abstract | Some embodiments include methods of forming metal-containing oxides. The methods may utilize ALD where a substrate surface is exposed to an organometallic composition while the substrate surface is at a temperature of at least 275°C to form a metal-containing layer. The metal-containing layer may then be exposed to at least one oxidizing agent to convert the metal-containing layer to a metal-containing oxide. The ALD may occur in a reaction chamber, with the oxidizing agent and the organometallic composition being present within such chamber at substantially non-overlapping times relative to one another. The oxidizing agent may be a milder oxidizing agent than ozone. The metal-containing oxide may be utilized as a capacitor dielectric, and may be incorporated into a DRAM unit cell. |
| priorityDate | 2007-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 50.