| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 |
| filingDate |
2009-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f76a585eefed281cd9299aa2bea8d4e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d0f390a6c13315aa7f0d88332f415d3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5ccf5ea24877ac576ad6e83d979a694
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c20f324abaf1ca5f30c27235554b9220
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51a0548ea59f68eeb53bdd5aaf34a9df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ce9768d1e24845c2a6c37e21ef6d30e |
| publicationDate |
2016-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2154141-B1 |
| titleOfInvention |
Precursors for depositing silicon-containing films and methods using same |
| priorityDate |
2008-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |