http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2134887-B1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_db7f746625801d6ac7aad99d27611382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1667
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
filingDate 2008-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2011-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b15b6fa6788f27339bccf969c6da5de
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_706beafbe604bb7674daf85e8a98547b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c2f510fcdf555df96bb4aff3e7c0677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a0094af763fa4e49ebe3820d157e36f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a37b3223ca719dc6a8abb4a6977974cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96c4762fd8ca6ed242b10038a01f3f19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7c6b77896c3ec24bdc789447dff29c0
publicationDate 2011-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-2134887-B1
titleOfInvention Method for the precision processing of substrates and use of said method
abstract The invention relates to a method for the precision processing of substrates, in particular for the microstructuring of thin layers, for the local introduction of doping agents and the local application of a metal seed layer, wherein a fluid-supported laser, which is to say a laser irradiation of a substrate that is covered in the regions to be processed by an appropriate reactive fluid is conducted.
priorityDate 2007-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24385
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID935
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24470
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452754495
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579089
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25736
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412584819
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559477
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2201750
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425762086
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707770
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID26042
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID314553
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID944
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450542361
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID455667478
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452316439
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11246
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448253108
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24586
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457766247
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24813
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5462311
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID417317624
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23964
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458391465
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559357
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1118
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23932
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410510985
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426694112
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23954
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2724003
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451572542
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID314553
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419405613
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14767304
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549332
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5360311
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22497
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11389371
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546200
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID140819
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557109
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23976
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392901
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450181837
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID136043571
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412550040
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23963

Total number of triples: 85.