| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d898e199c2777b124606891a1d88e947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65G2249-02 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65G49-066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6776
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68707
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0649
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67721
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-566
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67754
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0657
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67712
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67706 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 |
| filingDate |
2008-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a01fe3098fee787585f6012fc298fe21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6feba88c1d47bb5e16343685d4f28383
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7340c34794c3a513acf1cb557c6e2fb9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3dd036ae7aec531361b843f05526f4a5 |
| publicationDate |
2009-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2132355-A2 |
| titleOfInvention |
System and method for glass sheet semiconductor coating and resultant product |
| abstract |
A system (20) and method for coating semiconductor material on glass sheets is performed by conveying the glass sheets vertically suspended at upper extremities thereof through a system (20) having a housing (22) including a vacuum chamber (24). The glass sheets are conveyed on shuttles (42) through an entry load lock station (26) into the housing vacuum chamber (24), through a heating station (30) and at least one deposition station (32, 34) in the housing (22), and to a cooling station 36 prior to exiting of the system through an exit load lock station (28). The resultant semiconductor coated glass sheet (G) has tong marks (44') formed during the coating processing. |
| priorityDate |
2007-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |