http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2124075-A1
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_168e7d1c85d1f41726aaa99e1591c460 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01D5-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-1857 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-165 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-18 |
filingDate | 2009-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c5cf03440ce0d7cf00e2fa05b45342c |
publicationDate | 2009-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | EP-2124075-A1 |
titleOfInvention | Optical grating and method of producing same, and linear encoder and optical microscope equipped with optical grating |
abstract | A method of producing an optical grating includes: forming a first film 12 comprising a substance having an aromatic ring that becomes a free radical and can undergo desorption on exposure to light on at least one surface of a glass substrate 10 (S100), exposing the first film 12 in a grating pattern using light of a wavelength that is capable of desorbing the aromatic ring in the form of a free radical (S102), washing the surface of the exposed first film 12 with water, thereby exposing hydroxyl groups 16 within the light-exposed portions (S104), forming a second film 18 by applying a substance having an amino group capable of bonding with the hydroxyl groups exposed in a grating pattern on the surface of the first film 12 by the water washing, thereby reacting the amino groups with the hydroxyl groups (S106), providing catalyst nuclei to the second film 18 to form a catalyst nuclei layer (S108), and forming a light reflection layer by electroless plating to the catalyst nuclei (S110). |
priorityDate | 2008-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.