| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e777e0fb338ac4ff2b5b517d9226e365 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-9513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2290-70 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02084
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-0209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02072 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-24 |
| filingDate |
2007-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0201155bdccf3334b60e76e5c8fa47dd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed01ad0fb0c7d2a09d857145e5e02efd |
| publicationDate |
2009-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2097713-A2 |
| titleOfInvention |
Apparatus and method for measuring characteristics of surface features |
| abstract |
An apparatus is disclosed which includes an interferometry system configured to operate in a first mode to produce a first set of multiple interferometry signals corresponding to different illumination angles of a test object by test light and in a second mode produce a second set of multiple interferometry signals corresponding to different surface locations of a test object. An electronic processor coupled to the interferometry system is configured to receive the first set of interferometry signals and programmed to compare information derivable from the first set of multiple interferometry signals to information corresponding to multiple models of the test object to determine information related to one or features of the test object, and output the information. In some embodiments, the features include an under-resolved feature. |
| priorityDate |
2006-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |