| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 |
| filingDate |
2007-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28982cb9d17a6325514c4e90fb431d56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6bed80d7905e00f656042764b33bef91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16b8332c86d59001dbe879637bfed24a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61bf0104e44f1786cbea4aefad861cdc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_edec0abbb5db1a68a4b5bb717c7a420a |
| publicationDate |
2019-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2092035-B1 |
| titleOfInvention |
Compositions and methods for cmp of low-k dielectric materials |
| priorityDate |
2006-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |