http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2091306-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9019c0ce5cb7b82c85e121f6cac86dce |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24557 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0815 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R33-282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-252 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R33-28 |
| filingDate | 2007-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d1fb1426cfe363dff1512eae49c2ef5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d8218b05af79423559c7d33e5afc534 |
| publicationDate | 2009-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-2091306-A1 |
| titleOfInvention | Spin-polarization ion beam generator, scattering spectroscope using the spin-polarization ion beam, and specimen processing device |
| abstract | A spin polarized ion beam generation apparatus (30) can efficiently generate a spin polarized ion by using a pumping light generator (33) to an ion in a high frequency discharge tube (15) to irradiate optical pumping (33,34) by circularly polarized light and linearly polarized light orthogonal to each other to a metastable atom. For example, a polarized helium ion beam having a spin polarization rate that exceeds 18% and that is as high as 25% can be generated. The spin polarized ion beam generation apparatus (30) also can be applied to a processing apparatus and an analysis apparatus that can irradiate a polarized ion beam to a specimen. According to the spin polarized ion scattering spectroscopy apparatus, the spin status in a region at a depth of about 2 to 3 atomic layers from the surface of the specimen can be measured while discriminating the elements from the atomic layer with a reduced measurement time and with a high accuracy impossible in the conventional technique. |
| priorityDate | 2006-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.