Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02107 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0752 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-56 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
filingDate |
2008-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2011-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_091f113bb7cfd143a72c22b8b9922610 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4f04400920727cf56f01b5702ae1a91 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b91be0fb738fb2c71aa9dcc2a16bf99 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c35dc31e0f008513854fb397a72146b |
publicationDate |
2011-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-2063319-B1 |
titleOfInvention |
Metal oxide-containing film-forming composition, multilayer resist and method of formation of pattern in a substrate |
priorityDate |
2007-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |