| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c4b5184b7a8fe02a0c2cc4e509230214 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-32 |
| filingDate |
2007-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d6ffa30571569ea09db353e7f6e05f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_673ba151fe95872acad81438200534f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_640b6337f876d0a86b1a6a0d4d3e6e21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3cde7106cdc72462d7d4d3de6a03f57
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8aa277d9f27f6e4cf9990a5db5908f46 |
| publicationDate |
2009-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2049304-A1 |
| titleOfInvention |
Chemical mechanical polishing pads comprising liquid organic material core encapsulated in polymer shell and methods for producing the same |
| abstract |
There is provided a chemical mechanical polishing (CMP) pad including a core of a polymer shell encapsulating a liquid organic material having one of a boiling point and a decomposition point of 130 0C or more in a polymer matrix, the CMP pad having open pores formed by the core on a polishing surface thereof, and a method of producing the CMP pad. The CMP pad having a high hardness and a high density improves polishing efficiency and flatness of a wafer and maintains a uniform size of the core, thereby producing pads having high polishing efficiency and stable polishing performance. |
| priorityDate |
2006-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |