| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4edd4e526605dbd18b513b4b30d19ab2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2101-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2321-185
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2315-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2103-346
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2209-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2311-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2321-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2209-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F11-121
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2323-283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2311-04 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D65-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-583
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D71-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D67-0088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-5236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D61-147 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D71-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-52 |
| filingDate |
2008-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42d116a691bea62c0c7993d3a876c3a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29e3b92ff5eade5bf4d4bcbe2b3b83f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b61c5640127247b648eca4d1e09a9b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c603cdadff701927cafb4256de3968df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7f30470a763cdced1f7d7c14635e340 |
| publicationDate |
2009-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2039657-A1 |
| titleOfInvention |
Hydrofluoric acid treatment apparatus |
| abstract |
An apparatus for the treatment of semiconductor processing wastewater containing hydrofluoric acid. Hydrofluoric acid is introduced into a treatment tank (11A) in a pH adjustment unit (10) and an alkali chemical is introduced to adjust pH to be between 8 and 10. Neutralized wastewater is introduced to a reaction tank (11B) for reaction with calcium in order to form calcium fluoride which is further separated from the treated wastewater (11C). As the pH meter (14) is provided in a circulating path (P3) in the pH adjustment unit (10) and never comes into direct contact with the acidic wastewater, the pH meter (14) is protected from being damaged by high concentration of hydrofluoric acid. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103172199-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103172199-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112758938-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112758938-A |
| priorityDate |
2007-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |