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publicationDate 2009-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-2029689-A1
titleOfInvention Polishing composition containing polyether amine
abstract The inventive chemical-mechanical polishing system comprises a polishing component, a liquid carrier, and a polyether amine. The inventive method comprises chemically-mechanically polishing a substrate with the aforementioned polishing system.
priorityDate 2006-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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