| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76879
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2003-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c78646a949772f34ed340f1d5672ae8a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75df2360969f1961103e1e2a2e14b946
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e3db45cb3bf623a7e68e7763a67f817 |
| publicationDate |
2012-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2028686-B1 |
| titleOfInvention |
Method for electrodepositing a metal, especially copper, and use of said method |
| priorityDate |
2002-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |