http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2027431-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f864970818f059d845c14abf864d6b8e |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2290-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2290-20 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-2441 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02071 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-24 |
| filingDate | 2007-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53434c5b534309fbf03c6b538e380c16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da83a083b83a0b34c5ad07b1ce474757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30400b3a2725a7362889fd6386d6b671 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_698b7473cf73c07a19c707fa17dd6c49 |
| publicationDate | 2009-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-2027431-A1 |
| titleOfInvention | Surface characteristic determining apparatus |
| abstract | Light from the first and second different wavelength light sources is combined and supplied to a director that directs zeroth order light to a reference surface and other order, generally first order diffracted light to on a location of the sample surface which is dependent upon wavelength. Light reflected by the sample and reference surfaces interfere. A characteristic of a sample surface is determined from interference light of the first wavelength. Interference light of the second wavelength is used to enable phase-locking by adjusting the path length difference by moving the reference surface or changing the refractive index of a path portion to compensate for phase variation due to environmental effects. Non- mechanical scanning is used to scan the sample surface by using a variable wavelength source and a director providing different first order diffraction angles for different wavelengths or an acousto-optical device that provides a variable pitch acoustic diffraction grating. |
| priorityDate | 2006-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.