http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2018659-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_042c7cf8fc042582f58d47e14b446416 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate | 2007-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a1182fea3057b3b380adb0d32164092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a351656cc5c311c7650c0a2ca95f95e8 |
| publicationDate | 2009-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-2018659-A1 |
| titleOfInvention | Device and method for wet treating plate-like substrates |
| abstract | Disclosed is a device for wet treatment of plate-like articles comprising: a first plate, holding means for holding a single plate-like article substantially parallel to said first plate, first dispensing means for introducing liquid into a first gap between said first plate and a plate-like article when being treated, wherein the first plate is a silicon plate, which consists at least 99 wt% of silicon, the silicon plate being in contact with the treatment liquid, when the plate-like article is treated. Further disclosed is a method associated therewith. |
| priorityDate | 2006-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.