| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fc1a506cdfa120bc95f2833fd1d23421 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-1224 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-00 |
| filingDate |
2007-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44a190e32217e8b85a73cc792b969b5f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39af732fd74b03aea50ea8f25b94dc19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63aeb49f1fc9008b8b39c69d92b38223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8fb130b74e0f106c818cd511b840110 |
| publicationDate |
2010-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1979122-B1 |
| titleOfInvention |
Method for removing material from solids and use thereof |
| abstract |
The invention relates to a method for removing material from solids, especially for microstructuring and cutting, by liquid jet-guided laser etching, the removed material and non-reacted etching components being highly recoverable. The method according to the invention allows high purity silicon being either recovered in polycrystalline form or being deposited on other substrates in the same process chain by epitaxy. |
| priorityDate |
2006-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |