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filingDate 2006-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2008-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1972937-A1
titleOfInvention Probe array substrate, method of producing the same and method of producing probe array
abstract A probe array base including probe-holding portions (102) which are periodically arranged on a solid base member (100) and which have grooves (105) is prepared by anisotropically etching a single-crystalline silicon substrate. Probe solutions are supplied to the probe-holding portions from a plurality of tank arrays having a certain cylinder period by capillary action. This allows a probe array to be completed. The probe array is used as, for example, a DNA or antigen chip, has a high degree of integration, and is capable of holding a constant and sufficient number of probe molecules.
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