| abstract |
A piezoelectric device (1) includes a substrate (11); and a laminated film (16) formed above the substrate. The laminated film includes a lower electrode layer (12), a piezoelectric layer (13), and an upper electrode layer (14) formed in this order, and the lower electrode layer (12) is a metal electrode layer containing as one or more main components one or more nonnoble metals and/or one or more nonnoble alloys. Preferably, the one or more main components are one or more of the metals Cr, W, Ti, Al, Fe, Mo, In, Sn, Ni, Cu, Co, and Ta, and alloys of the metals. |