http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1966409-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d9f3ca41550d315642580237250c5b0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-246 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 |
| filingDate | 2006-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53234e57f436a50a61d78c680b8d5fa1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bafdbcbb63811fd4f6bb515de28d4a06 |
| publicationDate | 2008-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-1966409-A1 |
| titleOfInvention | Delivering particulate material to a vaporization zone |
| abstract | It is an object of the present invention to provide an effective way of replenishing particulate material for vaporization. This object is achieved by a method for delivering material into a deposition chamber having a vaporization zone to vaporize such material to form a layer. The improvement includes providing a cartridge defining a cavity for receiving material under a controlled environment for preventing material contamination, receiving material from the cavity and translating such received material along a feed path to the vaporization zone and removably securing the cartridge to the deposition chamber. |
| priorityDate | 2005-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 66.