| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b2bed4b4d247d7fe14cfd9610d22c463 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-71
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-153 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-3644
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-3652
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-3639
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-3618
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-3626
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-3435
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C23-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-3681
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-366
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C23-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-3417
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-3613 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C23-00 |
| filingDate |
2006-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d50a7c3a6a41d3617d67a3f6804440d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c6e42ddca7eddf0bfe447e4d27789c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2a5c1ef6a634dde749e2c59591b3f87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98650886a3f6323ab450e649b84bc4e8 |
| publicationDate |
2017-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1943197-B1 |
| titleOfInvention |
Substrate processing method |
| priorityDate |
2005-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |