http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1879220-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_31b1220216408a6076f55e0ba4ec1003 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-187 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-18 |
| filingDate | 2007-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa0d64d25aae3b980f37bfa0d778ce6d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_428777eb8edff79f1d7e9059ce568f18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6b461077b9a47a50cca7fed7a82f4e3 |
| publicationDate | 2008-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-1879220-A2 |
| titleOfInvention | Direct water-repellent gluing method of two substrates used in electronics, optics or optoelectronics |
| abstract | The invention relates to a process for direct hydrophobic bonding of the front faces (11, 21) of two substrates (1, 2) intended for use in electronics, optics or optoelectronics, at least one of which comprises a layer of semiconductor material (1, 13, 2, 20, 23) which extends on or near its front face (11, 21).n n n This method is remarkable in that it comprises the following steps: subjecting at least the front face (11, 21) of the substrate comprising a semiconductor or at least one of the front faces (11, 21) of the two substrates if the two substrates comprise a semiconductor, to a thermal treatment of preparation before bonding, at a temperature between 900 ° C and 1200 ° C, in a gaseous atmosphere comprising hydrogen and / or argon, for a period of at least 30 seconds, • sticking directly against each other, said respective front faces (11, 21) of the two substrates to be bonded (1, 2). |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8722515-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8530334-B2 |
| priorityDate | 2006-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.