| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_063a1b324005ddc15e16e7529c6258c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_224f8a2fec8ce0dd329687eb413b1c4c |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2006-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4eb57a444b092e88fc722d4b94e4597a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4528d3ea2a251d68398394f40f6654a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_498b157baac0b35021b93feafcc05cc2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7cb70896180ecf971fb3fe92c9b58731
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5454a293e40b0252074646667834632e |
| publicationDate |
2009-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1869691-B1 |
| titleOfInvention |
Gas shower plate for plasma processing apparatus |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102014118704-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015104155-A1 |
| priorityDate |
2005-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |