| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7ef01e33058cf740cf2197991be97af1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9bceffddb90b9b3da8a772212961764b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc3e639586089fe232d0cfb27383c875 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249953 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02142
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-61 |
| filingDate |
2006-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5a16211fa92418cf8519b395c0893a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61661673176b653d1e61f62c24deabeb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_248f70e890ad8f4ef76dbcc83c0710a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27a8e2ea3e9eb057a59e379ff5deb3ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed68e248286f4b72dd5077568376b0dd |
| publicationDate |
2007-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1867687-A1 |
| titleOfInvention |
Precursor composition for porous membrane and process for preparation thereof, porous membrane and process for production thereof, and semiconductor device |
| abstract |
A precursor composition for porous film comprising at least one member selected from the group consisting of compounds represented by the following general formulas: Si(OR 1 ) 4 and R a (Si)(OR 2 ) 4-a (in the formulas, R 1 represents a monovalent organic group; R represents a hydrogen atom, a fluorine atom or a monovalent organic group; R 2 represents a monovalent organic group; a is an integer ranging from 1 to 3, provided that R, R 1 and R 2 may be the same or different); a heat decomposable organic compound capable of being thermally decomposed at a temperature of not less than 250°C; and at least one element selected from the group consisting of elements each having a catalytic action, and organic solvent. A hydrophobic compound is subjected to a gas-phase polymerization reaction in the presence of a solution of this precursor composition to thus form a hydrophobic porous film having a low dielectric constant, a low refractive index and high mechanical strength. A semiconductor device prepared using the porous film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2043136-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2043136-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10319584-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8563409-B2 |
| priorityDate |
2005-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |