http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1852679-A1

Outgoing Links

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filingDate 2006-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa7d935b571ad3ff3913c253ee838129
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publicationDate 2007-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1852679-A1
titleOfInvention Oscillatory gyro sensor
abstract To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensor 1 according to the present invention includes a supporting substrate 2, which has a circuit element mounted thereon and a wiring pattern having a plurality of lands 4 disposed thereon; and a vibration element 20 mounted on a surface 2-1 of the supporting substrate. The vibration element 20 includes a base portion 22 having a mounting surface 22-2 provided with a plurality of terminals 25 that are connected to the lands; and a vibrator portion 23 extending integrally from a side of the base portion 22 in a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion 22, the substrate-facing surface being provided with a first electrode layer 27, a piezoelectric layer 28 stacked on the first electrode layer, and a second electrode layer 29, 30 stacked on the piezoelectric layer. The vibration element 20 is mounted on the supporting substrate 2 by joining the terminals 25 to the lands 4 with metallic projections 26 disposed therebetween.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012236507-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2363689-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2061101-A3
priorityDate 2005-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1333289-A1
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Total number of triples: 32.