Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01C19-5656 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01C19-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01C19-5663 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01C19-5656 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01C19-5663 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01C19-56 |
filingDate |
2006-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa7d935b571ad3ff3913c253ee838129 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec568f30ee614212312d0620d9adfc7b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38d24ffedf0a3729cef50ee2c13dde08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1edd7d8dccbda944d34c0e6f3c6a250 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1cc939c49eed2feca255c98d2249d940 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca30c9782e61dd9002627ead42cdf1fd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebe22a927dc6da228473d5d0157e0d0a |
publicationDate |
2007-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-1852679-A1 |
titleOfInvention |
Oscillatory gyro sensor |
abstract |
To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensor 1 according to the present invention includes a supporting substrate 2, which has a circuit element mounted thereon and a wiring pattern having a plurality of lands 4 disposed thereon; and a vibration element 20 mounted on a surface 2-1 of the supporting substrate. The vibration element 20 includes a base portion 22 having a mounting surface 22-2 provided with a plurality of terminals 25 that are connected to the lands; and a vibrator portion 23 extending integrally from a side of the base portion 22 in a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion 22, the substrate-facing surface being provided with a first electrode layer 27, a piezoelectric layer 28 stacked on the first electrode layer, and a second electrode layer 29, 30 stacked on the piezoelectric layer. The vibration element 20 is mounted on the supporting substrate 2 by joining the terminals 25 to the lands 4 with metallic projections 26 disposed therebetween. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012236507-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2363689-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2061101-A3 |
priorityDate |
2005-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |