| abstract |
A laser processing apparatus comprising a processing laser source (60,360), a scanning head (370A) for deflecting the direction of laser beam to the X-Y directions and an X-Y table (380) for placing a work piece to process said work piece with the laser beam by controlling the X-Y table and the scanning head, wherein at least two or more scanning heads (370A,370B) are provided, a beam splitter (364) is provided between said processing laser source and an optical path of the scanning head and the laser beam is distributed by this beam splitter to supply to each scanning head. |