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publicationDate 2007-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1849187-A2
titleOfInvention Wiring patterns formed by selective metal plating
abstract Conductive sidewall spacer stractures are formed using a method tiiat patterns structures (mandrels) and activates the sidewalls of the structures. Metal ions are attached to the sidewalls of the structures and these metal ions are reduced to form seed material. The structures are then trimmed and the seed material is plated to form wiring on the sidewalls of the structures.
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