| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_00a421ab71bd49a451d0a49d23a082c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cef1f43aa7ea51e6a592082d9f2a3103 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0315
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249953 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00293 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
| filingDate |
2007-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c2f29294c866e99c604ea1ffad910d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7eb30dd0b4b5784e93b1f28f8be57221
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c12cbe92a179309c5aaffcb968f66bf8 |
| publicationDate |
2007-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1840081-A2 |
| titleOfInvention |
Method for forming a hermetically sealed cavity |
| abstract |
A method is provided for forming hermetically sealed cavities (20), e.g. semiconductor cavities comprising fragile devices, MEMS or NEMS devices (12). The method according to embodiments of the present invention allows forming hermetically sealed cavities (20) at a controlled atmosphere and pressure and at low temperatures, preferably at temperatures not exceeding 200°C. The method furthermore allows forming sealed cavities (20) with short release times, for example release times of a few minutes to 30 minutes. The method may for example be used for zero level packaging of MEMS or NEMS devices. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9511999-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013089635-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2327658-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2199252-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009130681-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009130681-A3 |
| priorityDate |
2006-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |