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publicationDate 2007-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1835346-A1
titleOfInvention Photosensitive silane coupling agent, method of forming pattern, and method of fabricating device
abstract Provided is a photosensitive silane coupling agent for forming a low-defect microparticle pattern, dot array pattern, or hole array pattern with a smaller number of process steps, and a method of forming a pattern using such photosensitive silane coupling agent. Used is a photosensitive silane coupling agent having a secondary amino group protected by an o-nitrobenzyloxycarbonyl group.
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