| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02351
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-127 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J9-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-46 |
| filingDate |
2004-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f6d158fade619576976b30c983a5fc2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f0162d3514279f80fb8def9dfe81d6b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed460044ad31c10b6c59c410f39c1d2b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f73bae8d51cff769ad23a2ffee036378
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6c4f021ad89fcf7562db14e3bd26e19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf382e9170b4d0e9ccad68a4ef1f8887 |
| publicationDate |
2008-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1832351-B1 |
| titleOfInvention |
Low dielectric materials and methods for making same |
| priorityDate |
2003-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |