| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L33-066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L2312-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L67-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0276
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D135-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L33-066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L67-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D167-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D145-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-064 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D133-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D135-00 |
| filingDate |
2007-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9fbb3868b832970980028799f9e6ec2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e967c981e5adc9af89897347f1e8cde3 |
| publicationDate |
2007-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1829942-A1 |
| titleOfInvention |
Coating compositions for use with an overcoated photoresist |
| abstract |
Organic coating composition are provided including antireflective coating compositions that can reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing or via-fill layer. Preferred organic coating compositions of the invention comprise one or more resins that can harden upon thermal treatment without generation of a cleavage product. Particularly preferred organic coating compositions of the invention comprise one or more components that comprise anhydride and hydroxy moieties. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7989144-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009136242-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102591154-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7932018-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8017296-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8486609-B2 |
| priorityDate |
2006-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |