http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1826814-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_063a1b324005ddc15e16e7529c6258c4 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32412 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| filingDate | 2005-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7ced39ca4590e6fcb5266c14b142c72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_104635bafb65d8a2624fed9b88db630f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e40d64563d6816c976a31223566996b6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc0872ae97b1d8c30c25204de89a1057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e35c7d359f67a15c7720d54dbd4c86e2 |
| publicationDate | 2010-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-1826814-B1 |
| titleOfInvention | Plasma doping method |
| abstract | To realize a plasma doping method which can control a dosage precisely to improve an in-plane homogeneity of the dosage. The plasma doping method is based on such a discovery, while noting the result, that the dosage of boron is substantially constant for a time period, if a silicon substrate is irradiated with a B2H6/He plasma and is biased, and that the saturation time period is longer and stabler than that, for which the repetitions of an apparatus control can be retained. When the plasma irradiation is started, the dosage increases at first, but then continues to be substantially constant independently of the time change. The dosage then decreases if the time is elongated. If this time period, for which the dosage is substantially constant independently of the time change, is employed as a process window, the dosage can be precisely controlled. |
| priorityDate | 2004-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.