http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1808685-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ac41839c2abee06aead92c6400de5766 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L21-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0019 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0016 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L21-22 |
| filingDate | 2003-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fee72aeced197a1bad39eb504677369 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d4969aab6f62ab25b6ff3dbe09816f6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e9b798532708017c67824a18d22afff |
| publicationDate | 2007-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-1808685-A2 |
| titleOfInvention | Pressure sensor with vibrating member |
| abstract | The invention concerns a pressure sensor including: a micro-electromechanical vibrating device, comprising a silicon substrate (15') onto which a multilayer vibrating assembly (321) is formed; a control device (21') of said assembly in order to make it oscillate relative to said substrate at the resonance frequency or at another known frequency; and a detector for detecting the actual frequency and/or amplitude of said oscillation. Since said actual frequency and/or amplitude are affected by the conditions, in particular the pressure, of the external environment, the variations of said frequency and said amplitude with respect to the values set by said control device can be used to measure pressure variations in the surrounding environment. |
| priorityDate | 2003-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.