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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
filingDate 2007-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92e7710475420c56168894017da09be8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d36a8d58938a2b8a14e98087b8f396f8
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publicationDate 2007-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1806621-A1
titleOfInvention Coating compositions for photoresists
abstract In one aspect, the present invention relates to coating compositions that comprise a resin component, wherein the predominant portion of the resin component comprising one or more resins that are at least substantially free of fluorine. Coating compositions of the invention are useful as photoresist overcoat layers, including in immersion lithography processing.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210022735-A
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2233978-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019243238-A1
priorityDate 2006-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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