| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1054 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76254 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-18 |
| filingDate |
2005-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6164f5de4c4a6470cc817c1379647671
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_327e6a7f0becd982cd746fbba77b3ff7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e11965185f4d2d2098832702bcf861a5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95f3c23abcc0cbbd3407e7e0097d9f5b |
| publicationDate |
2008-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1800345-A4 |
| titleOfInvention |
PROCESS FOR PREPARING DEFECT-FREE SUBSTRATE FROM SIGE-ON ISOLATOR (SGOI) WITH HIGH GE-CONTENT (25%) USING WAFER BONDING TECHNIQUES |
| abstract |
A method for achieving a substantially defect free SGOI substrate which includes a SiGe layer that has a high Ge content of greater than about 25% atomic using a low temperature wafer bonding technique is described. The wafer bonding process described in the present application includes an initial prebonding annealing step that is capable of forming a bonding interface comprising elements of Si, Ge and O, i.e., interfacial SiGeO layer, between a SiGe layer and a low temperature oxide layer. The present invention also provides the SGOI substrate and structure that contains the same |
| priorityDate |
2004-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |