http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1794579-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-435 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2437 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 |
| filingDate | 2005-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc385b76fd6a6c28ec53410f5de85d6f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cfac4ed2d44b21bbf21db97ba6f685d0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61b6952749691d35c4f8ee0a62ce1903 |
| publicationDate | 2007-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-1794579-A1 |
| titleOfInvention | Piezo-acoustic thin film resonator having a crystalline zinc oxide layer |
| abstract | The invention relates to a capacitor structure (1) comprising a lower electrode layer (5) disposed on a substrate (3), an upper electrode layer (6) and a crystalline zinc oxide-containing dielectric layer (2) interposed between the electrode layers. The capacitor structure is characterized in that an amorphous dielectric intermediate layer (4) is interposed between the lower electrode layer and the crystalline zinc oxide-containing dielectric layer. The invention also relates to a method for producing the aforementioned capacitor structure. Said method comprises the following steps: a) providing the substrate, b) producing the lower electrode layer on a substrate surface of the substrate, c) producing the amorphous intermediate layer on the lower electrode layer, d) producing the crystalline zinc oxide-containing dielectric layer on the intermediate layer, and e) producing the upper electrode layer on the crystalline zinc oxide-containing dielectric layer. The amorphous dielectric layer is adapted to produce during deposition of the zinc oxide an electrical field which is tipped in relation to the normal to the surface of the substrate surface or the lower electrode layer. The zinc oxide monocrystals therefore grow at an angle, thereby providing a crystalline dielectric layer that can be induced to shear vibrations. The inventive capacitor structures are used as piezo-acoustic resonators (10) which are used for detecting the substance of a fluid (13), especially of a liquid (e.g. as biosensor). |
| priorityDate | 2004-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.