| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5858f3a8fd92eec55e7647eb2c9f8992 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate |
2005-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4d60b05ec8d7e54caf19567c0ab28ce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_daf24eaa6d85384df41bb18f88aa55ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91bfd0e8c0e7b03c43bc9f14470af0f0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_015d247adb5902ad929ee10f42fba6d7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ac92f60194bcd422c1013e9d031ff59 |
| publicationDate |
2007-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1790756-A1 |
| titleOfInvention |
Thin-film forming apparatus |
| abstract |
To provide a thin-film forming apparatus capable of forming a thin-film by bringing ions of some degree in plasma into contact with the thin-film. n This thin-film forming apparatus (1) comprises a plasma generating means (80) disposed at a position corresponding to an opening (11a) of a vacuum chamber (11) for producing plasma in the vacuum chamber (11), a base plate holder (13) for holding a substrate in the vacuum chamber (11), and an ion quenching means (90) disposed between the plasma generating means (80) and the base plate holder (13). When the plasma generating means (80) are projected directly onto the base plate holder (13), the projection image of plasma generating means (80) shielded by the ion quenching means (90) has an area smaller than the residual image of plasma generating means (80) projected onto the base plate holder (13). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8581495-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-202008008731-U1 |
| priorityDate |
2004-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |