http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1772460-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F9-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F11-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-08 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 |
| filingDate | 2006-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a1a62fffe6926a274f503bda1f17ec4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9aac8ddd335820732fe30159e5fee5b9 |
| publicationDate | 2007-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-1772460-A1 |
| titleOfInvention | Ti, Ta, Hf, Zr and related metal silicon amides for ALD/CVD of metal-silicon nitrides, oxides, oxides or oxynitrides |
| abstract | Novel organometallic complexes represented by the structure:n nwherein each R a is independently selected from dialkylamide, difluoralkylamide, hydrogen, alkyl, alkoxy, fluoroalkoxy, fluoroalkyl, cycloaliphatic, and aryl or two adjacent R a can together form a ring optionally containing nitrogen or oxygen; neach R b is independently selected from dialkylamide, difluoralkylamide, hydrogen, alkyl, alkoxy, fluoroalkoxy, fluoroalkyl, cycloaliphatic, and aryl; nM is a metal of Group 4, 5 or 6 of the Periodic Table of the Elements; nx is at least 1 and nwhen M is a Group 4 metal, 2x + y = 4, nwhen M is a Group 5 metal, 2x + y =5, and nwhen M is a Group 6 metal, 2x + y = 6, nare of use in chemical vapour and atomic layer deposition processes. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022127724-A1 |
| priorityDate | 2005-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 137.