| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_14ba71eccbb5f65a22b78f39b3c6ffc3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0315
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-025 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00158 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 |
| filingDate |
2005-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b3e7d0e29d7debf99a777c72b15924e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3660ced254f11426ce49dafe058f74a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8e890ab07c09bf683c71bffe997fb71 |
| publicationDate |
2008-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1770055-B1 |
| titleOfInvention |
Process for manufacturing thick suspended structures of semiconductor material |
| priorityDate |
2005-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |